Analysis of Static behavior, Frequency, and Capacitance of Three Plates Microswitch Using Modified Couple Stress Theory

Document Type : Dynamics, Vibrations, and Control

Authors

1 Professor, Faculty of Aerospace Engineering, Malek-e-Ashtar University of Technology, Tehran, Iran

2 Ph.D., Faculty of Mechanical Engineering, Urmia University, Urmia, Iran

3 Corresponidng author: Associate Professor, Faculty of Mechanical Engineering, Khatamul-Anbiya Air Defense University, Tehran, Iran

Abstract

Considering the importance of the effects of the characteristic length parameter in studying the stability of microswitches, this paper discusses and studies the stability of microswitches by considering this effect and using the improved coupled stress theory. The microswitch studied in this paper is a three-plane microswitch in which the microbeam is suspended between two fixed electrodes. Recently, such microswitches have attracted the attention of some researchers and research has been conducted on the analysis of the static and dynamic behavior of these switches. For this purpose, the governing equation for the dynamic and static behavior of the microswitch is presented using the coupled stress theory and the classical beam theory. To solve the governing equation, which is a nonlinear equation; the stepwise linearization method is used. The results governing the static behavior of the microswitch and the determination of the instability voltage under different voltage ratio conditions are determined and compared using both the coupled stress theory and the classical beam theory. In addition to the above, how the frequency and capacitance of the microswitch change with respect to the applied voltage change are presented and compared using the coupled stress theory and the classical beam theory.

Graphical Abstract

Analysis of Static behavior, Frequency, and Capacitance of Three Plates Microswitch Using Modified Couple Stress Theory

Highlights

  • The effects of the characteristic length parameter in checking the stability of microswitches.
  • How the frequency changes compared to the applied voltage change.
  • Determination of instability voltage in different conditions.

Keywords

Main Subjects

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References

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Aerospace Mechanics
Volume 21, Issue 1 - Serial Number 79
Serial No. 79, Spring Quarterly
June 2025
Pages 97-108

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History

  • Receive Date: 22 October 2024
  • Revise Date: 29 December 2024
  • Accept Date: 05 January 2025
  • Publish Date: 22 May 2025

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