- Marinescu, L. D. , Shero, E. U., and Doi, K. “Hand Book of Lapping and Polishing”, CRC Press, 2007.##
- Tam, H. Y., Cheng, H .B., and Wang, Y. W. “Removal rate and Surface Roughness in Lapping and Polishing of Optical Components”, Journal of Material Processing Technology, Vol. 192-193, pp. 276-280, 2007.##
- Sivanandini, M., Dhami, S. and Pabla, B. “Chemical Mechanical Polishing by Colloidal Silica Slurry”, International Journal of Engineering Research and Applications, Vol. 3, No. 3, pp. 1337-1345, 2013.##
- Jung, S. H. “Chemical Mechanical Polishing of Copper Using Nano Particle-Based Slurries”, Phd Dissertation, University of Florida, 2005.##
- Bouzid, N. D. and Herold, V. “Correlation Between Surface Quality and the Abrasive Grains Wear in Optical Glass Lapping”, Tribology International, Vol. 40, pp. 498-502, 2007.##
- Raghava, V. and Kakireddy, R. “Effect of Temperature on copper Chemical Mechanical Planarization”, Dissertations, University of South Florida, 2007.##
- Brink-Smeier, E., Riemer, O. and Gessenharter, A. “Finishing of Structured Surfaces by Abrasive Polishing”, Precision Engineering, Vol. 30, pp. 325-336, 2011.##
- Takaya, Y., Kishida, H. and Hayashi, T. “Chemical Mechanical Polishing of Patterned Copper Wafer Surface Using Water-Soluble Fullerenol Slurry”, CIRP Annals, Manufacturing Technology, Vol. 60, pp. 567-570, 2011.##
- Lee, H. S., jeong, H. D. and Dornfeld, D. A. “Semi-Empirical Material Removal Rate Distribution Model for Sio2 Chemical Mechanical Polishing (CMP) Processes”, Precision Engineering, Vol. 37, No. 2, pp. 483-490, 2013.##
- Pang, J .S., Ansari, M. N. M., Zaroog, Omar S. Moaz H. Ali, Sapuan, S. M. “Taguchi Design Optimization Of Machining Parameters on the CNC End Milling Process of Halloysite Nanotube With Aluminium Reinforced Epoxy Matrix (HNT/Al/Ep) Hybrid Composite”, HBRC Journal, Vol. 10, No. 2, pp. 138-144, 2014.##
- Lee, Hsin-Min and Chen, Tzung-Ming “A Study of Polishing Feature of Ultrasonic-Assisted Vibration Method in Bamboo Charcoal”, Advances in Materials Science and Engineering, pp. 1-7, September 2017.##
12. Roy, R. “A Primer on the Taguchi Method”, 1th Eddition, (Translated by D. Moradkhani, F. Taghavi), Zanjan University Publication Center, 2007. (in Persian)##
)
